Abstract
MEMS microshutter arrays for James Webb Space Telescope
Mary J. Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh
Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen,
Audrey Ewin, David Franz, Larry Hess, Ron Hu, Kamili M. Jackson, Murzy
Jhabvala, Dan Kelly, Todd King, Gunther Kletetschka, Alexander Kutyrev,
Barney Lynch, Timothy Miller, Harvey Moseley, Jr., Vilem Mikula, Brent
Mott, Lance Oh, James T. Pontius, David Rapchun, Chris Ray, Eric
Schulte, Scott Schwinger, Peter Shu, Robert Silverberg, Wayne Smith,
Steve Snodgrass, David Sohl, Leroy Sparr, Rosalind Steptoe-Jackson,
Valeriano Veronica, Liqin Wang, Yun Zheng, Chris Zincke
Publication: Proc. SPIE Vol. 6415, 64150B, Micro-
and Nanotechnology: Materials, Processes, Packaging, and Systems III;
Jung-Chih Chiao, Andrew S. Dzurak, Chennupati Jagadish, David V. Thiel;
Eds.
Publication
Date: Dec 2006
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Abstract
MEMS microshutter arrays (MSAs) are being developed at NASA Goddard
Space Flight Center for use as an aperture array for the Near-Infrared
Spectrometer (NirSpec). The instruments will be carried on the James
Webb Space Telescope (JWST), the next generation of space telescope
after Hubble Space Telescope retires. The microshutter arrays are
designed for the selective transmission of light with high efficiency
and high contrast. Arrays are close-packed silicon nitride membranes
with a pixel size of 105x204 µm. Individual shutters are
patterned with a torsion flexure permitting shutters to open 90 degrees
with a minimized mechanical stress concentration. Light shields are
made on each shutter for light leak prevention to enhance optical
contrast. Shutters are actuated magnetically, latched and addressed
electrostatically. The shutter arrays are fabricated using MEMS
technologies. Single-side indium flip chip bonding is performed to
attach microshutter arrays to substrates.
©2007 SPIE--The International Society for Optical Engineering.
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